4. Optics: measuring and testing
  5. Inspection of flaws or impurities
  6. Surface condition

Johan Maria Van Boxmeer

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Inspection method and apparatus lithographic apparatus,...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Lithographic apparatus, method of exposing a substrate,...

Optics: measuring and testing – Dimension – Thickness
Reexamination Certificate

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