4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Joe Feng

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Method and apparatus for applying films using reduced...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Method and apparatus for depositing antireflective coating

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Method and apparatus for depositing antireflective coating

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Method and apparatus for improving accuracy in...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Reexamination Certificate

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Method for applying films using reduced deposition rates

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Profile ID: LFUS-PAI-P-1495528

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