4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Jochen Hanebeck

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Method of producing alignment marks

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Techniques for etching a silicon dioxide-containing layer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Profile ID: LFUS-PAI-P-1248383

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