4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Jiun-Chung Lee

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Method for endpoint detection for copper CMP

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Method for endpoint detection for copper CMP

Abrading – Precision device or process - or with condition responsive... – By optical sensor
Reexamination Certificate

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Method for reducing stress and improving step-coverage of tungst

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Patent

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Profile ID: LFUS-PAI-P-198039

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