4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Jiro Nishihama

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Low pressure CVD system

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Thermal treatment system for semiconductors

Heating – Work feeding – agitating – discharging or conveying... – Having closure or seal for work feeder's entrance passage
Reexamination Certificate

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Vacuum envelope for a display device

Electric lamp and discharge devices – Cathode ray tube – Screen
Reexamination Certificate

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Vertical wafer boat

Supports: racks – Special article – Platelike
Patent

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Profile ID: LFUS-PAI-P-430005

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