Vertical wafer boat

Details Vertical wafer boat Vertical wafer boat

1997-02-24

2000-05-23

Gibson, Jr., Robert W.

Supports: racks

Special article

Platelike

206454, 118500, 118724, A47F 700

Patent

active

060656158

ABSTRACT:
A pair of annular end plates and a plurality of bars which are made of silicon carbide are formed in an integrally coupled/joined structure, having an entire length of not less than 800 mm. The end plates are unitary annular plates. Padding of silicon carbide is formed at a coupled/joined portion between an end plate and a bar so that the coupled/joined portion exhibits an obtuse corner.

REFERENCES:
patent: D409158 (1999-05-01), Shimazu
patent: 5458688 (1995-10-01), Watanabe
patent: 5534074 (1996-07-01), Koons
patent: 5752609 (1998-05-01), Kato et al.
patent: 5858103 (1999-01-01), Nakajima et al.
Patent Abstracts of Japan, vol. 96, No. 8, Aug. 30, 1996, & JP 08 102446, Apr. 16, 1996.

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