4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Jingyi Bai

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Method to reduce charge buildup during high aspect ratio...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method to reduce charge buildup during high aspect ratio...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Methods for filling high aspect ratio trenches in...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Methods for filling high aspect ratio trenches in...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Pitch reduced patterns relative to photolithography features

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2286364

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