4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. Using film of etchant between a stationary surface and a...

Jim Woodling

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Prevention of edge stain in silicon wafers by oxygen annealing

Etching a substrate: processes – Nongaseous phase etching of substrate – Using film of etchant between a stationary surface and a...
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Prevention of edge stain in silicon wafers by ozone dipping

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – By reaction with substrate
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