4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Jim Elmer

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High-k dielectric bird's beak optimizations using...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method and apparatus for reducing microtrenching for...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2730964

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