4. Data processing: generic control systems or specific application
  5. Generic control system, apparatus or process
  6. Optimization or adaptive control

Jeremy Isaac Martin

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Method and apparatus for pressure and plasma control during...

Data processing: generic control systems or specific application – Generic control system – apparatus or process – Optimization or adaptive control
Reexamination Certificate

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Method and apparatus for pressure and plasma control during...

Data processing: generic control systems or specific application – Generic control system – apparatus or process – Optimization or adaptive control
Reexamination Certificate

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Repair of film having an SI-O backbone

Semiconductor device manufacturing: process – Repair or restoration
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2377427

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