4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Jeremy I. Martin

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Copper damascene with low-k capping layer and improved...

Semiconductor device manufacturing: process – Silicon carbide semiconductor
Reexamination Certificate

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Copper damascene with low-k capping layer and improved...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Dual slurry particle sizes for reducing microscratching of...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Graded oxide caps on low dielectric constant (low K)...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
Reexamination Certificate

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Method and test structure for characterizing sidewall damage...

Electricity: measuring and testing – Fault detecting in electric circuits and of electric components – Of individual circuit component or element
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Profile ID: LFUS-PAI-P-2078562

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