4. Abrading
  5. Flexible-member tool, per se
  6. Interrupted or composite work face

Jeffrey S. Kollodge

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Article suitable for chemical mechanical planarization...

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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Pad constructions for chemical mechanical planarization...

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Polishing fluids and methods for CMP

Abrading – Abrading process – Glass or stone abrading
Reexamination Certificate

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Polishing fluids and methods for CMP

Abrasive tool making process – material – or composition – With inorganic material
Reexamination Certificate

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Polishing fluids and methods for CMP

Compositions – Etching or brightening compositions – Inorganic acid containing
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2594579

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