Pad constructions for chemical mechanical planarization...

Details Pad constructions for chemical mechanical planarization... Pad constructions for chemical mechanical planarization...

2007-01-16

2007-01-16

Rose, Robert A. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C451S533000, C051S298000

Reexamination Certificate

active

10744761

ABSTRACT:
The present invention is directed to an abrasive article comprising a fixed abrasive layer and a subpad. The fixed abrasive element is co-extensive with the subpad. The subpad comprises a resilient element. The resilient element has a Shore A hardness of no greater than 60 as measured using ASTM-2240.

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Volara® Type EO, Voltek Technical Data Sheet.

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