4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Jeffrey Loewecke

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Divergent charged particle implantation for improved...

Radiant energy – With charged particle beam deflection or focussing – With detector
Reexamination Certificate

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Method for implanter angle verification and calibration

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method for implanter angle verification and calibration

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method for implanting dopants within a substrate by tilting...

Semiconductor device manufacturing: process – Introduction of conductivity modifying dopant into... – Ion implantation of dopant into semiconductor region
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2391712

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