4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Jeff Chinn

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Metal mask etching of silicon

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains inorganic material
Reexamination Certificate

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Method for etching a trench having rounded top and bottom...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for etching polysilicon to have a smooth surface

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Method for in situ removal of a dielectric antireflective...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of micromachining a multi-part cavity

Etching a substrate: processes – Forming or treating electrical conductor article – Forming or treating of groove or through hole
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Profile ID: LFUS-PAI-P-1740914

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