4. Pumps
  5. Motor driven
  6. Electric or magnetic motor

Jean-Luc Rival

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EUV source

Radiant energy – Radiant energy generation and sources – With radiation modifying member
Reexamination Certificate

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Monobloc housing for vacuum pump

Pumps – Motor driven – Electric or magnetic motor
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Transport pod with protection by the thermophoresis effect

Special receptacle or package – For plate or sheet – Fragile or sensitive
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Vacuum pump

Rotary kinetic fluid motors or pumps – Working fluid passage or distributing means associated with... – Plural rigidly related blade sets
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Profile ID: LFUS-PAI-P-2672162

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