EUV source

Radiant energy – Radiant energy generation and sources – With radiation modifying member

Reexamination Certificate

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Details

C250S493100, C378S119000, C378S143000, C378S124000

Reexamination Certificate

active

07095038

ABSTRACT:
The EUV radiation source of the invention comprises an irradiation chamber (1) containing an irradiation zone (3) into which a stream of radiation-generator material is generated such as a flow of xenon propagating along a direction (II—II) extending transversely relative to an optical axis (I—I). The irradiation zone (3) is in the proximity of a diaphragm (4) oriented on the optical axis (I—I) and putting the irradiation chamber (1) into communication with a transmission chamber (2). Power laser beams (5, 6) strike the stream of radiation-generator material in the irradiation zone (3) and produce EUV radiation which propagates through the diaphragm (4) and which is conditioned in the transmission chamber (2) by elliptical mirrors (13). Differential pumps (11, 12) maintain a pressure P2in the transmission chamber (2) that is well below the pressure P1in the irradiation chamber (1). The low pressure in the transmission chamber (2) ensures that the EUV radiation is transmitted with little attenuation to a zone of use, without requiring voluminous high speed pumps (11, 12).

REFERENCES:
patent: 5991360 (1999-11-01), Matsui et al.
patent: 6304630 (2001-10-01), Bisschops et al.
patent: 6788763 (2004-09-01), Neff et al.
patent: 6882704 (2005-04-01), Schriever et al.
patent: 0 858 249 (1998-08-01), None
patent: 1 047 288 (2000-10-01), None

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