4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

Jean Camplan

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High current ion implanter

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Ion source having fluid-cooled supply conductors

Electric lamp and discharge devices – With temperature modifier – For filament or heated cathode
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Movable extraction electrode for an ion source

Electric lamp and discharge devices – With positive or negative ion acceleration – Extraction or target electrode
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Profile ID: LFUS-PAI-P-180223

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