Movable extraction electrode for an ion source

Details Movable extraction electrode for an ion source Movable extraction electrode for an ion source

1978-11-28

1980-06-10

Demeo, Palmer C.

Electric lamp and discharge devices

With positive or negative ion acceleration

Extraction or target electrode

250423R, 313146, H01J 194, H01J 2700, H05H 100

Patent

active

042074894

ABSTRACT:
The extraction electrode consists of a metallic screen provided with an opening and placed within a vacuum chamber in front of an ion source, the screen being brought to a negative potential with respect to the source. Displacement of the electrode is controlled from the exterior of the chamber by two mechanical systems for independent displacement of the two lateral sides of the screen. Each system comprises a deformable parallelogram pivotally coupled to a member for supporting one side of the screen and to a member which is slidably mounted on a guide column, and a mechanism for controlling the deformation of the parallelogram by means of a link-arm rigidly fixed at one end to a toothed wheel in mesh with an endless screw and control rod which is accessible from the exterior of the chamber. The invention is primarily applicable to the construction of ion implanters, especially for the fabrication of semiconductors.

REFERENCES:
patent: 2292087 (1942-08-01), Ramo
patent: 3187179 (1965-06-01), Craig et al.
patent: 3660715 (1972-05-01), Post

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