Single-crystal, oriented-crystal, and epitaxy growth processes;
Processes of growth from liquid or supercritical state
Having pulling during growth
Inventor
active
Argon/ammonia rapid thermal annealing for silicon wafers
Czochralski pullers for manufacturing monocrystalline...
Czochralski pullers including heat shield housings having...
Insulating-containing ring-shaped heat shields and support...
Method of fabricating nano SOI wafer and nano SOI wafer...
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