4. Compositions
  5. Etching or brightening compositions

Jason Aggio

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Composition and method for planarizing surfaces

Compositions – Etching or brightening compositions
Reexamination Certificate

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Compositions and methods for CMP of low-k-dielectric materials

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2325759

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