Composition and method for planarizing surfaces

Details Composition and method for planarizing surfaces Composition and method for planarizing surfaces

2011-06-07

2011-06-07

Deo, Duy-Vu N (Department: 1713)

Compositions

Etching or brightening compositions

C252S079200, C252S079300, C252S079400, C438S672000, C438S689000, C438S693000

Reexamination Certificate

active

07955519

ABSTRACT:
The invention provides compositions and methods for planarizing or polishing a surface. One composition comprises about 0.01 wt. % to about 20 wt. % α-alumina particles, wherein the α-alumina particles have an average diameter of 200 nm or less, and 80% of the α-alumina particles have a diameter of about 500 nm or less, an organic acid, a corrosion inhibitor, and water. Another composition comprises α-alumina particles, an organic acid, dual corrosion inhibitors of triazole and benzotriazole, wherein the wt. % ratio of the triazole to benzotriazole is about 0.1 to about 4.8, and water.

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