4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Jarrett L. Hamilton

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Modular deposition system having batch processing and serial thi

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Modular deposition system having batch processing and serial...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Modular sputtering machine having batch processing and serial th

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Patent

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Profile ID: LFUS-PAI-P-1814280

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