Modular sputtering machine having batch processing and serial th

Details Modular sputtering machine having batch processing and serial th Modular sputtering machine having batch processing and serial th

1995-08-07

1998-01-06

Breneman, R. Bruce

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20429803, 20429807, 20429809, 20429815, 20429818, 20429817, 20429819, 2042982, 20429823, 20429827, C23C 1434, C23C 1456

Patent

active

057050449

ABSTRACT:
A flexible, modular sputtering machine comprises a number of batch process stations which define a batch process path. At least one of the batch process stations is a sputtering station including a serial sputtering chamber and an interchamber disk transfer mechanism. The disks move in batches along the process path, being individually processed only at the sputtering chamber. A preferred sputtering source is also provided which allows selective sputtering of multiple materials within a single sputtering chamber. The selection of sputtering materials is controlled by varying the magnetic field within the sputtering chamber. A cassette for transporting and holding batches of disk substrates during batch processing allows individual access to the disks for the interchamber disk transfer mechanism.

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