4. Etching a substrate: processes
  5. Etching of semiconductor material to produce an article...

Jaroslaw W. Winniczek

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Full spectrum endpoint detection

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Method and apparatus for removing photoresist

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Methods and apparatus for determining an etch endpoint in a...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Methods and apparatus for determining an etch endpoint in a...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
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Methods for reducing mask erosion during plasma etching

Etching a substrate: processes – Etching of semiconductor material to produce an article...
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Profile ID: LFUS-PAI-P-1400140

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