4. Coating apparatus
  5. Gas or vapor deposition

Jari Vanhatalo

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Aparatus for varying the flux of a molecular beam

Coating apparatus – Gas or vapor deposition
Patent

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Molecular beam epitaxy source cell

Coating apparatus – Gas or vapor deposition
Patent

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Phosphorus effusion cell arrangement and method for...

Chemistry of inorganic compounds – Phosphorus or compound thereof – Elemental phosphorus
Reexamination Certificate

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Profile ID: LFUS-PAI-P-765863

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