4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Radiation sensitive composition or product or process of making

James J. Bucchignano

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E-beam application to mask making using new improved KRS resist

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
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E-beam application to mask making using new improved KRS resist

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent

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Forming a pattern of a negative photoresist

Radiation imagery chemistry: process – composition – or product th – Imaged product – Nonsilver image
Reexamination Certificate

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Forming a pattern of a negative photoresist

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Forming nonplanar surface
Reexamination Certificate

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Fused aromatic structures and methods for photolithographic...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Profile ID: LFUS-PAI-P-319517

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