4. Optics: measuring and testing
  5. By dispersed light spectroscopy
  6. Utilizing a spectrometer

James H. Underwood

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Optical system for high resolution spectrometer/monochromator

Optics: measuring and testing – By dispersed light spectroscopy – Utilizing a spectrometer
Patent

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Reflectometer device

Radiant energy – Luminophor irradiation – With ultraviolet source
Reexamination Certificate

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System for inspecting EUV lithography masks

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1764592

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