Reflectometer device

Details Reflectometer device Reflectometer device

2005-03-08

2005-03-08

Smith, Zandra V. (Department: 2877)

Radiant energy

Luminophor irradiation

With ultraviolet source

C356S445000

Reexamination Certificate

active

06864490

ABSTRACT:
A reflectometer device for determining the quality characteristics of an electronic chip mask blank utilizing a source of electromagnetic radiation in the extreme ultraviolet region. The source is passed to a monochrometer which includes a mirror, a rotatable grating, and an exit slit. The radiation travels to the mirror and is reflected to the grating which, in turn, provides a source of electromagnetic radiation which is essentially continuous and of a particular bandwidth. The grating is rotated to tune such source of electromagnetic radiation which is passed to the subject blank mask. Upon reflection from the mask, a detector determines the intensity of the reflected beam from the mask and translates such measurement into a determination of reflectivity.

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