4. Semiconductor device manufacturing: process
  5. With measuring or testing
  6. Optical characteristic sensed

James B. Stirton

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Method and apparatus for analyzing line structures

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate

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Method and apparatus for dispatching based on metrology tool...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Method and apparatus for filtering metrology data based on...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Method and apparatus for optical film stack fault detection

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
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Profile ID: LFUS-PAI-P-2556646

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