Method and apparatus for dispatching based on metrology tool...

Details Method and apparatus for dispatching based on metrology tool... Method and apparatus for dispatching based on metrology tool...

2005-11-22

2005-11-22

Hoff, Marc S. (Department: 2857)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C700S175000, C702S182000

Reexamination Certificate

active

06968252

ABSTRACT:
A method for dispatching based on metrology tool performance includes determining a precision metric associated with each of a plurality of metrology tools. A metrology request including context information is generated. A precision requirement for the metrology request is identified based on the context information. A set of the metrology tools capable of satisfying the metrology request is identified based on the precision requirement and the precision metrics. A manufacturing system includes a manufacturing execution system server and a metrology monitor. The manufacturing execution system server is configured to generate a metrology request including context information. The metrology monitor is configured to determine a precision metric associated with each of a plurality of metrology tools, identify a precision requirement for the metrology request based on the context information, and identify a set of the metrology tools capable of satisfying the metrology request based on the precision requirement and the precision metrics.

REFERENCES:
patent: 6392403 (2002-05-01), Conboy et al.
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patent: 6790686 (2004-09-01), Purdy et al.
patent: 6871114 (2005-03-01), Green et al.
patent: 2003/0029383 (2003-02-01), Ward et al.
patent: 2005/0094138 (2005-05-01), Hasan

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