4. Measuring and testing
  5. Sampler, sample handling, etc.
  6. With constituent separation

James A. Gilhooly

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Accumulator for slurry sampling

Abrading – Abrading process – With tool treating or forming
Reexamination Certificate

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Apparatus for detecting CMP endpoint in acidic slurries

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – For liquid etchant
Reexamination Certificate

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Chemical mechanical polishing endpoint process control

Abrading – Precision device or process - or with condition responsive... – Computer controlled
Reexamination Certificate

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Chemiluminescence detection apparatus

Chemical apparatus and process disinfecting – deodorizing – preser – Analyzer – structured indicator – or manipulative laboratory... – Chemiluminescent
Reexamination Certificate

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Method for detecting CMP endpoint in acidic slurries

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1607294

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