4. Abrasive tool making process, material, or composition
  5. With inorganic material
  6. Clay, silica, or silicate

Jagdish Prasad

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Benign method for etching silicon dioxide

Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
Patent

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High selectivity slurry for shallow trench isolation processing

Abrasive tool making process – material – or composition – With inorganic material – Clay – silica – or silicate
Patent

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Methods for sidewall protection of metal interconnect for...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1110270

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