4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Jae Hyung Yi

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CMOS-compatible light emitting aperiodic photonic structures

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Energy coupled superlattice structures for silicon based...

Optical waveguides – Planar optical waveguide – Thin film optical waveguide
Reexamination Certificate

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Method for fabricating GaN substrate

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2063996

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