Energy coupled superlattice structures for silicon based...

Details Energy coupled superlattice structures for silicon based... Energy coupled superlattice structures for silicon based...

2006-07-21

2010-06-15

Rojas, Omar (Department: 2874)

Optical waveguides

Planar optical waveguide

Thin film optical waveguide

C385S142000

Reexamination Certificate

active

07738756

ABSTRACT:
A waveguide structure includes a SOI substrate. A core structure is formed on the SOI substrate comprising a plurality of multilayers having alternating or aperiodically distributed thin layers of either Si-rich oxide (SRO), Si-rich nitride (SRN) or Si-rich oxynitride (SRON). The multilayers are doped with a rare earth material so as to extend the emission range of the waveguide structure to the near infrared region. A low index cladding includes conductive oxides to act as electrodes.

REFERENCES:
patent: 5319727 (1994-06-01), Ford et al.
patent: 6593212 (2003-07-01), Kub et al.
patent: 7135699 (2006-11-01), Atanackovic
patent: 2002/0048289 (2002-04-01), Atanackovic et al.
Timoshenko et al., “Comparative study of photoluminescence of undoped and erbium-doped size-controlled nanocrystalline Si/SiO2multilayered structures” Journal of Applied Physics, vol. 96, No. 4, pp. 2254-2260.
Tsybeskov et al., “Nanocrystalline-silicon superlattice produced by controlled recrystallization”Appl. Phys. Letters, 72, Jan. 5, 1998, pp. 43-45.
Park et al., “Effect of Amorphous Si Quantum-Dot Size on 1.54nm Luminescence of ER” Journal of The Electrochemical Society, 152 (6) pp. 445-447.
Iacona et al., “Silicon nanocrystals and Er3+ ions in an optical microcavity” Journal of Applied Physics, vol. 89, No. 12, pp. 8354-8356.
Gourbilleau et al., “Fabrication and optical properties of Er-doped multilayers Si-rich SiO2/SiO2: size control, optimum Er-Si coupling and interaction distance monitoring” Optical Materials 27 (2005) pp. 868-875.
Saini et al., “A high index contrast silicon oxynitride materials platform for Er-doped microphotonic amplifiers” Mat. Res. Soc. Symp. Proc. vol. 817, 2004 Materials Research Society, XP-002345855, pp. L1.7.1-L1.7.7.
Seo et al., “Controlling Er-Tm interaction in Er-Tm codoped silicon-rich silicon oxide using nanometer-scale spatial separation for efficient, broadband infrared luminescence” Applied Physics Letters, vol. 85 No. 18, Nov. 2004, pp. 4151-4153.

Affiliated with

Also associated with

Rating

Energy coupled superlattice structures for silicon based... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Energy coupled superlattice structures for silicon based..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Energy coupled superlattice structures for silicon based... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4151163