Single-crystal, oriented-crystal, and epitaxy growth processes;
Forming from vapor or gaseous state
With decomposition of a precursor
Inventor
active
Compound semi-conductors and controlled doping thereof
Compound semiconductor and controlled doping thereof
Electronic angular position encoder apparatus
Lateral movement of screw dislocations during homoepitaxial...
Method for growing low-defect single crystal heteroepitaxial...
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