4. Measuring and testing
  5. Speed, velocity, or acceleration
  6. Acceleration determination utilizing inertial element

InvenSense Inc.

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Method and system of releasing a MEMS structure

Semiconductor device manufacturing: process – Semiconductor substrate dicing
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Multiple axis accelerometer

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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Vertically integrated MEMS structure with electronics in a...

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
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