4. Excavating

Internaitonal Business Machines Corporation

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Method for varying x-ray hybrid resist space dimensions

X-ray or gamma ray systems or devices – Specific application – Lithography
Patent

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Metrology tool error log analysis methodology and system

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
Reexamination Certificate

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Modified inverted-F antenna

Communications: radio wave antennas – Antennas – With grounding structure
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Serial input shift register built-in self test circuit for embed

Excavating
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