4. Radiant energy
  5. Irradiation of objects or material
  6. Ion or electron beam irradiation

IMS Nanofabrication AG

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Charged-particle exposure apparatus

Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
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Constant current multi-beam patterning

Radiation imagery chemistry: process – composition – or product th – Including control feature responsive to a test or measurement
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