Radiant energy – Irradiation of objects or material – Ion or electron beam irradiation
Reexamination Certificate
2006-02-16
2010-06-15
Berman, Jack I (Department: 2881)
Radiant energy
Irradiation of objects or material
Ion or electron beam irradiation
C250S492100, C250S492200, C313S420000
Reexamination Certificate
active
07737422
ABSTRACT:
A particle-beam projection processing apparatus for irradiating a target, with an illumination system for forming a wide-area illuminating beam of energetic electrically charged particles; a pattern definition means for positioning an aperture pattern in the path of the illuminating beam; and a projection system for projecting the beam thus patterned onto a target to be positioned after the projection system. A foil located across the path of the patterned beam is positioned between the pattern definition means and the position of the target at a location close to an image of the aperture pattern formed by the projection system.
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PCT International Search Report, dated Aug. 4, 2006.
R. L. Mills, J. Sankar, P. Ray, A. Voigt, J. He, B. Dhandapani, Synthesis of HDLC films from solid carbon, Journal of Materials Science, 2004, vol. 39, pp. 3309-3318.
Cernusca Stefan
Platzgummer Elmar
Stengl Gerhard
Berman Jack I
Chang Hanway
IMS Nanofabrication AG
RatnerPrestia
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