4. Radiant energy
  5. Irradiation of objects or material
  6. Irradiation of semiconductor devices

IMS-Ionen Mikrofabrikations Systeme GmbH

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Apparatus for enhancing the lifetime of stencil masks

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
Reexamination Certificate

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Electrostatic lens

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Ion irradiation of a target at very high and very low...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method for the purpose of producing a stencil mask

Etching a substrate: processes – Forming or treating mask used for its nonetching function
Patent

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Particle-optical imaging system for lithography purposes

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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