4. Coating processes
  5. Measuring, testing, or indicating

Ill-jin Jang

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Apparatus for spraying photoresist

Coating apparatus – Projection or spray type
Patent

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Method for designing a reticle mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Patent

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Photoresist suck-back device in manufacturing system for semicon

Fluid sprinkling – spraying – and diffusing – With cleaning means – drip collecting – waste disposal or soil... – Nozzle cleaner – flusher or drainer
Patent

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Wafer spin coating system with photoresist pumping unit check fu

Coating processes – Measuring – testing – or indicating
Patent

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Profile ID: LFUS-PAI-P-625505

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