4. Radiation imagery chemistry: process, composition, or product th
  5. Imaging affecting physical property of radiation sensitive...
  6. Making electrical device

Igor V. Peidous

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Dislocation free local oxidation of silicon with suppression of

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Making electrical device
Patent

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Dislocation free local oxidation of silicon with suppression...

Active solid-state devices (e.g. – transistors – solid-state diode – With means to control surface effects – Insulating coating
Reexamination Certificate

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Locos mask for suppression of narrow space field oxide thinning

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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LOCOS mask for suppression of narrow space field oxide...

Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Including dielectric isolation means
Reexamination Certificate

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Locos with bird's beak suppression by a nitrogen implantation

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Recessed oxide by localized oxidation
Patent

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Profile ID: LFUS-PAI-P-402894

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