4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Igor Krivts

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Chamber elements defining a movable internal chamber

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Deflection method and system for use in a charged particle...

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Electrostatic chuck for wafer metrology and inspection...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Electrostatic chuck for wafer metrology and inspection...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2793360

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