4. Abrading
  5. Machine
  6. Combined

IC Mic-Process, Inc.

Corporate Assignee

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Chemical-mechanical polishing apparatus with in-situ pad conditi

Abrading – Machine – Combined
Patent

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Slurry dispensing system for chemical-mechanical polishing appar

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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