Chemical-mechanical polishing apparatus with in-situ pad conditi

Details Chemical-mechanical polishing apparatus with in-situ pad conditi Chemical-mechanical polishing apparatus with in-situ pad conditi

1997-04-14

1998-11-03

Eley, Timothy V.

Abrading

Machine

Combined

451443, 451444, B24B 2118

Patent

active

058300430

ABSTRACT:
Chemical-mechanical polishing apparatus includes a pad reconditioning mechanism which comprises nested conical tubes which overly the pad. The outer tube has an array of holes in it much like the head of an electric razor and is rotated about its axis by being in contact with the rotating pad. The inner cone is stationary and has a longitudinal, downward-facing slot. An air stream from the narrow end of the inner cone towards the wide end carries particle-laden slurry to the wide end for removal or recycling. The nested cones are arranged like a detachable bridge with the narrow end secured to a non-rotating center core and the wide end secured to the top of the table in which the (now annular) platen rotates.

REFERENCES:
patent: 4525955 (1985-07-01), Cothrell et al.
patent: 4712334 (1987-12-01), Ikezaki et al.
patent: 5154021 (1992-10-01), Bombardier et al.
patent: 5738573 (1998-04-01), Yueh

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