4. Electricity: electrical systems and devices
  5. Electric charge generating or conducting means
  6. Use of forces of electric charge or field

Hyman Levinstein

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Hybrid Johnsen-Rahbek electrostatic chuck having highly resistiv

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Method for planarization of submicron vias and the manufacture o

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Oxide etch process with high selectivity to nitride suitable...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-438795

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