4. Coating processes
  5. Coating by vapor, gas, or smoke

Hyeon-Deok Lee

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Chemical vapor deposition method for depositing silicide and...

Coating processes – Coating by vapor – gas – or smoke
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Etch stop structure and method of manufacture, and...

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Method for cleaning a processing chamber and method for...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Method for forming a conductive film and a conductive...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Method of forming a contact in a semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-2612062

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