4. Etching a substrate: processes
  5. Masking of a substrate using material resistant to an etchant
  6. Mask resist contains inorganic material

Hung Ng

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Opto-thermal annealing methods for forming metal gate and...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Opto-thermal annealing methods for forming metal gate and...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Process for defining a pattern using an anti-reflective coating

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains inorganic material
Patent

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