4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Hung-Eil Kim

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Accurate contact critical dimension measurement using...

Data processing: measuring – calibrating – or testing – Measurement system – Dimensional determination
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Dark field trench in an alternating phase shift mask to...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method and system for determining flow rates for contact...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Method of forming an electronic device including forming...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method of verifying an optical proximity correction (OPC) model

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design
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Profile ID: LFUS-PAI-P-2309164

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